Semi-implicit level set formulation for lithographic source and mask optimization
نویسندگان
چکیده
منابع مشابه
A Semi-implicit Binary Level Set Method for Source Reconstruction Problems
Abstract. The aim of this paper is to investigate the application of a semiimplicit additive operator splitting scheme based binary level set method to source reconstruction problems. We reformulate the original model to be a new constrained optimization problem under the binary level set framework and solve it by the augmented Lagrangian method. Then we propose an efficient gradient-type algor...
متن کاملA Local Semi-Implicit Level-Set Method for Interface Motion
This paper proposes and implements a novel hybrid level set method which combines the numerical efficiency of the local level set approach with the temporal stability afforded by a semi-implicit technique. By introducing an extraction/insertion algorithm into the local level set approach, we can accurately capture complicated behaviors such as interface separation and coalescence. This techniqu...
متن کاملStability and Consistency of the Semi-implicit Co-volume Scheme for Regularized Mean Curvature Flow Equation in Level Set Formulation
Abstract. We show stability and consistency of the linear semi-implicit complementary volume numerical scheme for solving the regularized, in the sense of Evans and Spruck, mean curvature flow equation in the level set formulation. The numerical method is based on the finite volume methodology using so-called complementary volumes to a finite element triangulation. The scheme gives solution in ...
متن کاملA Semi-implicit Gradient Augmented Level Set Method
Here a semi-implicit formulation of the gradient augmented level set method is presented. The method is a hybrid Lagrangian–Eulerian method that may be easily applied in two or three dimensions. By tracking both the level set function and the gradient of the level set function, highly accurate descriptions of a moving interface can be formed. Stability is enhanced by the addition of a smoothing...
متن کاملA BINARY LEVEL SET METHOD FOR STRUCTURAL TOPOLOGY OPTIMIZATION
This paper proposes an effective algorithm based on the level set method (LSM) to solve shape and topology optimization problems. Since the conventional LSM has several limitations, a binary level set method (BLSM) is used instead. In the BLSM, the level set function can only take 1 and -1 values at convergence. Thus, it is related to phase-field methods. We don’t need to solve the Hamilton-Jac...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Optics Express
سال: 2019
ISSN: 1094-4087
DOI: 10.1364/oe.27.029659